JPH0635472Y2 - ウェーハボート - Google Patents
ウェーハボートInfo
- Publication number
- JPH0635472Y2 JPH0635472Y2 JP7744390U JP7744390U JPH0635472Y2 JP H0635472 Y2 JPH0635472 Y2 JP H0635472Y2 JP 7744390 U JP7744390 U JP 7744390U JP 7744390 U JP7744390 U JP 7744390U JP H0635472 Y2 JPH0635472 Y2 JP H0635472Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support rod
- boat
- wafer boat
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 45
- 238000010438 heat treatment Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7744390U JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7744390U JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0436242U JPH0436242U (en]) | 1992-03-26 |
| JPH0635472Y2 true JPH0635472Y2 (ja) | 1994-09-14 |
Family
ID=31619837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7744390U Expired - Lifetime JPH0635472Y2 (ja) | 1990-07-23 | 1990-07-23 | ウェーハボート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635472Y2 (en]) |
-
1990
- 1990-07-23 JP JP7744390U patent/JPH0635472Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436242U (en]) | 1992-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0635472Y2 (ja) | ウェーハボート | |
| JPS62128633U (en]) | ||
| JPH01168401U (en]) | ||
| JP2568209B2 (ja) | 半導体処理用カンチレバ− | |
| JPS6192627U (en]) | ||
| JP2579776B2 (ja) | 石英ガラス製フォーク | |
| JPS58189329A (ja) | 丸ビレツトの加熱方法 | |
| JP2512149Y2 (ja) | 台 盤 | |
| JPS63166342U (en]) | ||
| JPS62176114U (en]) | ||
| JPS635641U (en]) | ||
| JPH0361028U (en]) | ||
| JPS6319988U (en]) | ||
| JPH02719U (en]) | ||
| JPS62194539U (en]) | ||
| JPH029426U (en]) | ||
| JPH0182233U (en]) | ||
| JPS62178508U (en]) | ||
| JPS6389600U (en]) | ||
| JPS6278753U (en]) | ||
| CA2400260A1 (en) | Dental model tray used in forming dental model | |
| JPH0325464U (en]) | ||
| JPS6188242U (en]) | ||
| JPS6353639U (en]) | ||
| JPS622681U (en]) |